Large-Area Vacuum Evaporation Equipment
Classification:
This equipment is designed for R&D in industries such as perovskite solar cells, OLEDs, lithium batteries, quantum dot LEDs, OPVs (organic photovoltaics), and metal electrode thin films.
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Details Introduction
This PD-500s/800s large-area vacuum evaporation equipment is designed for R&D in industries such as perovskite solar cells, OLEDs, lithium batteries, quantum dot LEDs, OPVs (organic photovoltaics), and metal electrode thin films.
1.A protective mesh is installed in front of the mechanical pump, and additional filters and louvered covers are added to the exhaust port to prevent dust; the gas circuit is designed to minimize dust dispersion.
2.Excellent film thickness uniformity (±3% ~ ±5%) and repeatability (±3% ~ ±5%).
3.Automated control of the evaporation source output, with optional co-evaporation process capability.
4.Compatible with glove box integration.
5.Can be integrated with resistive and electron beam evaporation sources.
perovskite cell production equipment for solar cell
Parameter
|
Chamber Dimensions(304 stainless steel) (L x W x Hmm) |
500x500x600mm/800×700x700mm |
| Ultimate Vacuum | ≤3.0×10⁻⁵ Pa |
| Pumping Speed | From atmosphere to 8×10⁻⁴ Pa≤20 min |
| Substrate Holder | 350mm × 350mm |
| Evaporation Sources | Configuration supports 4-8 evaporation sources(organic/metal) |
Description
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